Varian Services

Waste Electrical and Electronic Equipment Directive

• VSEA is in agreement with SEMI’s position for excluding semiconductor manufacturing equipment under the WEEE Directive

• “There are no significant benefits of WEEE in the context of Semiconductor Manufacturing Equipment.”
• “The administrative costs are likely to be large with no significant benefit.”
• “For these reasons, we hope you agree with our assessment that the European Commission should exclude semiconductor manufacturing equipment under the scope of WEEE (as with the current Large-Scale Stationary Industry Tool exception).”

• VSEA’s position is that our Ion implanters do not fall under the WEEE directive