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| VIISta® High Energy |
| Varian Semiconductor offers the only single-wafer high energy implanters available on the market today. Our high energy VIISta series features true-zero degree implant and low contamination. VIISta high energy systems offer an advantage for semiconductor manufacturers that need increased device packing density in high-performance devices. |
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The VIISta high energy implanters feature:
- Outstanding process accuracy
- Highest productivity
- Excellent uniformity
- Outstanding angle control
- Medium-current back-up flexibility
Varian Semiconductor’s high energy products cover:
- Retrograde well
- Triple well
- Buried layers
- Most medium current applications
Our high energy implanters are based on a common platform, providing customers with flexibility in managing overall bay productivity, resulting in:
- Decreased time to first silicon
- Greater productivity across all applications
- Highest industry throughput
- Precise beam steering and tilt accuracy
- Flexible product mix changes
- Cost-effective training
- Increased return on investment
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