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| VIISta SuperScan provides a method of using VIISta ion implanters to compensate for non-uniformity of device electrical characteristics resulting from other semiconductor process steps. SuperScan improves device performance and yield. |
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Benefits
- Corrects Vt non-uniformity
- Compensates for gate-length critical dimension (CD) variations
- Designed for production and development applications
- Available as an option on new VIISta ion implanters and as an upgrade for installed systems
Features
- User defined, recipe-based dose control
- Recipe inputs
- Number of zones
- Dose in each zone
- Zone radius
Prerequisites
- VIISta roplat and universal endstation
- Version 6.90 sw and above
- Compatible VSEA dose controller
Available VIISta Systems
- Medium Current: VIISta 810HP, 810EHP, 810XE, 810XEr, 810XP and 900XP models
- High Current: VIISta 80HP, HC and HCP models
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