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| VIISta vMask is an implant mask available exclusively for Varian VIISta series ion implanters. By precisely masking portions of a silicon wafer, VIISta vMask enables customers to run multiple implant splits on a wafer. vMask significantly reduces chip development cost. |
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Benefits
- Reduces number of wafers required for development
- Reduces the impact of wafer-to-wafer variations
- Shortens the time to market for new designs
- Available as an option on new VIISta ion implanters and as an upgrade for installed systems
Features
- Four split-lot implants per wafer, each with a unique recipe
- Automated mask positioning, host or manual control
- Fully retractable and compatible with production tool requirements
Prerequisites
- VIISta roplat and universal endstation
- Version 6.90 sw and above
Available VIISta Systems
- Medium Current: VIISta 810HP, 810EHP, 810XE, 810XEr, 810XP and 900XP models
- High Current: VIISta 80HP, HC and HCP models
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